P

Inventor

KOBAYASHI SHIGERU

JP98 patents
⚠️ This page may combine multiple inventors who share the name “KOBAYASHI SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

16 patents
US4963239AOct 16, 1990

Sputtering process and an apparatus for carrying out the same

HITACHI LTD168 citations97
US4405435ASep 20, 1983

Apparatus for performing continuous treatment in vacuum

HITACHI LTD171 citations97
US5498768AMar 12, 1996

Process for forming multilayer wiring

HITACHI LTD60 citations96
US4610770ASep 9, 1986

Method and apparatus for sputtering

HITACHI LTD86 citations96
US6171641B1Jan 9, 2001

Vacuum processing apparatus, and a film deposition apparatus and a film deposition method both using the vacuum processing apparatus

HITACHI LTD71 citations95
US5574247ANov 12, 1996

CVD reactor apparatus

HITACHI LTD608 citations95
US4724060AFeb 9, 1988

Sputtering apparatus with film forming directivity

HITACHI LTD80 citations95
US4401539AAug 30, 1983

Sputtering cathode structure for sputtering apparatuses, method of controlling magnetic flux generated by said sputtering cathode structure, and method of forming films by use of said sputtering cathode structure

HITACHI LTD90 citations95
US5815396ASep 29, 1998

Vacuum processing device and film forming device and method using same

HITACHI LTD51 citations94
US5670421ASep 23, 1997

Process for forming multilayer wiring

HITACHI LTD31 citations92
US4902394AFeb 20, 1990

Sputtering method and apparatus

HITACHI LTD49 citations92
US4610774ASep 9, 1986

Target for sputtering

HITACHI LTD40 citations92
US4606802AAug 19, 1986

Planar magnetron sputtering with modified field configuration

HITACHI LTD36 citations92
US4444635AApr 24, 1984

Film forming method

HITACHI LTD50 citations92
US5707500AJan 13, 1998

Vacuum processing equipment, film coating equipment and deposition method

HITACHI LTD45 citations91
US4747926AMay 31, 1988

Conical-frustum sputtering target and magnetron sputtering apparatus

HITACHI LTD51 citations89

NISSAN MOTOR

4 patents

KAWASAKI STEEL CO

4 patents

KANSEI KK

3 patents

TYCO ELECTRONICS AMP KK

2 patents

TAKEDA CHEMICAL INDUSTRIES LTD

2 patents

SUMITOMO WIRING SYSTEMS

2 patents

NIPPON SHEET GLASS CO LTD

2 patents

OLYMPUS OPTICAL CO

1 patent

KOBAYASHI SHIGERU

1 patent

NIPPON LEAKLESS IND CO LTD

1 patent

SANYO ELECTRIC CO

1 patent

JAPAN SYNTHETIC RUBBER CO LTD

1 patent

ASMO CO LTD

1 patent

NORDSON CORP

1 patent

SHARP KK

1 patent

(unassigned)

1 patent

KYOWA HAKKO KOGYO KK

1 patent

NITTAN CO LTD

1 patent

RENESAS TECH CORP

1 patent

MARUKO KEIHOKI KK

1 patent

IBM

1 patent

KONISHIROKU PHOTO IND

1 patent

Showing the top 50 of 98 patents by PatentIndex Score.