Inventor
NGUYEN HANH
US17 patents
⚠️ This page may combine multiple inventors who share the name “NGUYEN HANH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS11393661B2Jul 19, 2022
Remote modular high-frequency source
APPLIED MATERIALS INC3 citations73
US10943768B2Mar 9, 2021
Modular high-frequency source with integrated gas distribution
APPLIED MATERIALS INC3 citations73
US11081317B2Aug 3, 2021
Modular high-frequency source
APPLIED MATERIALS INC3 citations72
US10269593B2Apr 23, 2019
Apparatus for coupling a hot wire source to a process chamber
APPLIED MATERIALS INC3 citations64
US12518948B2Jan 6, 2026
Remote modular high-frequency source
APPLIED MATERIALS INC0 citations62
US12002654B2Jun 4, 2024
Modular high-frequency source
APPLIED MATERIALS INC0 citations62
US11501955B2Nov 15, 2022
Modular high-frequency source with integrated gas distribution
APPLIED MATERIALS INC0 citations62
US11488796B2Nov 1, 2022
Thermal break for high-frequency antennae
APPLIED MATERIALS INC0 citations62
US12300497B2May 13, 2025
Method and apparatus of low temperature plasma enhanced chemical vapor deposition of graphene
APPLIED MATERIALS INC0 citations48