Inventor

JANAKIRAMAN KARTHIK

US75 patents

⚠️ This page may combine multiple inventors who share the name “JANAKIRAMAN KARTHIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JANAKIRAMAN KARTHIK

APPLIED MATERIALS INC

Blocker plate by-pass for remote plasma clean

Gas distribution showerhead

Integration of remote plasma generator with semiconductor processing chamber

Tunable ground planes in plasma chambers

Semiconductor process equipment

Gas distribution showerhead featuring exhaust apertures

Gas flow control in a wafer processing system having multiple chambers for performing same process

Backflush chamber clean

Semiconductor process equipment

Semiconductor process equipment

CVD based oxide-metal multi structure for 3D NAND memory devices

Processing system containing an isolation region separating a deposition chamber from a treatment chamber

Method for depositing an amorphous carbon film with improved density and step coverage

Micro-volume deposition chamber

Pre-treatment approach to improve continuity of ultra-thin amorphous silicon film on silicon oxide

Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers

Plasma enhanced deposition of silicon-containing films at low temperature

Methods to reduce material surface roughness

Multiple spacer patterning schemes

Methods for conformal doping of three dimensional structures

Method and system for supplying a cleaning gas into a process chamber

Apparatus and method for centering a substrate in a process chamber

Methods to improve the in-film defectivity of PECVD amorphous carbon films

Processes for depositing SiB films

Remote capacitively coupled plasma deposition of amorphous silicon

Boron concentration tunability in boron-silicon films

Metal-doped boron films

Boron concentration tunability in boron-silicon films

Methods to reduce material surface roughness

Apparatus and methods for improving thermal chemical vapor deposition (CVD) uniformity

CVD based oxide-metal multi structure for 3D NAND memory devices

Methods of forming hardmasks

Methods for producing high-density, nitrogen-doped carbon films for hardmasks and other patterning applications

Methods for producing high-density carbon films for hardmasks and other patterning applications

Film formation via pulsed RF plasma

Dynamic wafer leveling/tilting/swiveling steps for use during a chemical vapor deposition process

Method and system for supplying a cleaning gas into a process chamber

Methods of forming thermally stable carbon film

Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers

Processes for depositing sib films

Deposition radial and edge profile tunability through independent control of TEOS flow

Polysilicon liners

Deposition radial and edge profile tunability through independent control of TEOS flow

Controlling concentration profiles for deposited films using machine learning

Ion implantation for reduced hydrogen incorporation in amorphous silicon

Treatment for high-temperature cleans

SHAH ASHISH

Systems for plasma enhanced chemical vapor deposition and bevel edge etching

PADHI DEENESH

Methods to improve the in-film defectivity of PECVD amorphous carbon films

BERGER ALEXANDER J

Method and apparatus for masking solar cell substrates for deposition

INTEVAC INC

Inductive/capacitive hybrid plasma source and system with such chamber