Inventor
MEROLA JOSEPH J
US2 patents
Patents
2 patentsUS11319644B2May 3, 2022
System and method for increasing group III-nitride semiconductor growth rate and reducing damaging ion flux
GEORGIA TECH RES INST0 citations52
US10526723B2Jan 7, 2020
System and method for increasing III-nitride semiconductor growth rate and reducing damaging ion flux
GEORGIA TECH RES INST1 citations52