Inventor
LU CHIA-WEI
TW4 patents
Patents
4 patentsUS10763140B2Sep 1, 2020
Semiconductor processing station
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations70
US12557584B2Feb 17, 2026
Semiconductor processing station and semiconductor process using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11462425B2Oct 4, 2022
Semiconductor processing station
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10103042B2Oct 16, 2018
Chamber, semiconductor processing station, and semiconductor process using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49