Inventor
KAKUDA TORU
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KAKUDA TORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
5 patentsUS11101111B2Aug 24, 2021
Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus
KOKUSAI ELECTRIC CORP3 citations71
US11168396B2Nov 9, 2021
Method of manufacturing semiconductor device and recording medium
KOKUSAI ELECTRIC CORP0 citations61
US10985017B2Apr 20, 2021
Method of manufacturing semiconductor device and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP1 citations61
US12505989B2Dec 23, 2025
Substrate processing apparatus, and method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP0 citations60
US11948778B2Apr 2, 2024
Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations60
HITACHI INT ELECTRIC INC
3 patentsUS10763084B2Sep 1, 2020
Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus
HITACHI INT ELECTRIC INC4 citations82
US9793112B2Oct 17, 2017
Method of manufacturing semiconductor device and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC2 citations71
US12087598B2Sep 10, 2024
Substrate processing apparatus
HITACHI INT ELECTRIC INC1 citations62