Inventor
FOMENKOV IGOR V
US145 patents
⚠️ This page may combine multiple inventors who share the name “FOMENKOV IGOR V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
49 patentsUS6567450B2May 20, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC265 citations99
US6566667B1May 20, 2003
Plasma focus light source with improved pulse power system
CYMER INC185 citations99
US6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US6064072AMay 16, 2000
Plasma focus high energy photon source
CYMER INC190 citations99
US5729562AMar 17, 1998
Pulse power generating circuit with energy recovery
CYMER INC241 citations99
US7491954B2Feb 17, 2009
Drive laser delivery systems for EUV light source
CYMER INC84 citations98
US7439530B2Oct 21, 2008
LPP EUV light source drive laser system
CYMER INC76 citations98
US6744060B2Jun 1, 2004
Pulse power system for extreme ultraviolet and x-ray sources
CYMER INC79 citations98
US6625191B2Sep 23, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC236 citations98
US6538737B2Mar 25, 2003
High resolution etalon-grating spectrometer
CYMER INC109 citations98
US6452199B1Sep 17, 2002
Plasma focus high energy photon source with blast shield
CYMER INC134 citations98
US6094448AJul 25, 2000
Grating assembly with bi-directional bandwidth control
CYMER INC194 citations98
US5991324ANov 23, 1999
Reliable. modular, production quality narrow-band KRF excimer laser
CYMER INC196 citations98
US7872245B2Jan 18, 2011
Systems and methods for target material delivery in a laser produced plasma EUV light source
CYMER INC90 citations97
US7671349B2Mar 2, 2010
Laser produced plasma EUV light source
CYMER INC54 citations97
US7217940B2May 15, 2007
Collector for EUV light source
CYMER INC60 citations97
US7164144B2Jan 16, 2007
EUV light source
CYMER INC113 citations97
US7087914B2Aug 8, 2006
High repetition rate laser produced plasma EUV light source
CYMER INC109 citations97
US6972421B2Dec 6, 2005
Extreme ultraviolet light source
CYMER INC141 citations97
US6853653B2Feb 8, 2005
Laser spectral engineering for lithographic process
CYMER INC74 citations97
US6815700B2Nov 9, 2004
Plasma focus light source with improved pulse power system
CYMER INC113 citations97
US6757316B2Jun 29, 2004
Four KHz gas discharge laser
CYMER INC97 citations97
US6721340B1Apr 13, 2004
Bandwidth control technique for a laser
CYMER INC114 citations97
US6671294B2Dec 30, 2003
Laser spectral engineering for lithographic process
CYMER INC114 citations97
US6566668B2May 20, 2003
Plasma focus light source with tandem ellipsoidal mirror units
CYMER INC131 citations97
US6532247B2Mar 11, 2003
Laser wavelength control unit with piezoelectric driver
CYMER INC79 citations97
US6529531B1Mar 4, 2003
Fast wavelength correction technique for a laser
CYMER INC86 citations97
US6493374B1Dec 10, 2002
Smart laser with fast deformable grating
CYMER INC90 citations97
US6317447B1Nov 13, 2001
Electric discharge laser with acoustic chirp correction
CYMER INC108 citations97
US6192064B1Feb 20, 2001
Narrow band laser with fine wavelength control
CYMER INC258 citations97
US6078599AJun 20, 2000
Wavelength shift correction technique for a laser
CYMER INC115 citations97
US7655925B2Feb 2, 2010
Gas management system for a laser-produced-plasma EUV light source
CYMER INC43 citations96
US7642533B2Jan 5, 2010
Extreme ultraviolet light source
CYMER INC36 citations96
US7368741B2May 6, 2008
Extreme ultraviolet light source
CYMER INC65 citations96
US7361918B2Apr 22, 2008
High repetition rate laser produced plasma EUV light source
CYMER INC35 citations96
US7317196B2Jan 8, 2008
LPP EUV light source
CYMER INC54 citations96
US7154928B2Dec 26, 2006
Laser output beam wavefront splitter for bandwidth spectrum control
CYMER INC62 citations96
US6586757B2Jul 1, 2003
Plasma focus light source with active and buffer gas control
CYMER INC139 citations96
US6541786B1Apr 1, 2003
Plasma pinch high energy with debris collector
CYMER INC73 citations96
US6067306AMay 23, 2000
Laser-illuminated stepper or scanner with energy sensor feedback
CYMER INC84 citations96
US6005879ADec 21, 1999
Pulse energy control for excimer laser
CYMER INC231 citations96
US6034978AMar 7, 2000
Gas discharge laser with gas temperature control
CYMER INC70 citations95
US6466602B1Oct 15, 2002
Gas discharge laser long life electrodes
CYMER INC69 citations94
US7928416B2Apr 19, 2011
Laser produced plasma EUV light source
CYMER INC30 citations93
US7822092B2Oct 26, 2010
Laser system
CYMER INC37 citations93
US7630424B2Dec 8, 2009
Laser system
CYMER INC24 citations93
US7449704B2Nov 11, 2008
EUV light source
CYMER INC26 citations93
US7411203B2Aug 12, 2008
EUV light source
CYMER INC27 citations93
US7388220B2Jun 17, 2008
EUV light source
CYMER INC23 citations93
FOMENKOV IGOR V
1 patentShowing the top 50 of 145 patents by PatentIndex Score.