Inventor
EHMKE JOHN CHARLES
US13 patents
Patents
13 patentsUS10427932B2Oct 1, 2019
Hermetically sealed MEMS device and its fabrication
TEXAS INSTRUMENTS INC6 citations82
US9567213B1Feb 14, 2017
Hermetically-sealed MEMS device and its fabrication
TEXAS INSTRUMENTS INC4 citations71
US11084717B2Aug 10, 2021
Through-substrate conductor support
TEXAS INSTRUMENTS INC0 citations61
US11000915B2May 11, 2021
Stabilized transient liquid phase metal bonding material for hermetic wafer level packaging of MEMS devices
TEXAS INSTRUMENTS INC0 citations61
US10392246B2Aug 27, 2019
Through-substrate conductor support
TEXAS INSTRUMENTS INC1 citations61
US11858806B2Jan 2, 2024
Vertical shear weld wafer bonding
TEXAS INSTRUMENTS INC0 citations60
US11835739B2Dec 5, 2023
Dark mirror thin films
TEXAS INSTRUMENTS INC0 citations60
US11167983B2Nov 9, 2021
Selective wafer removal process for wafer bonding applications
TEXAS INSTRUMENTS INC0 citations60
US10759658B2Sep 1, 2020
Hermetic vertical shear weld wafer bonding
TEXAS INSTRUMENTS INC1 citations60
US7449765B2Nov 11, 2008
Semiconductor device and method of fabrication
TEXAS INSTRUMENTS INC2 citations60
US10750645B2Aug 18, 2020
Transparent display panel cooling
TEXAS INSTRUMENTS INC1 citations58
US9890036B2Feb 13, 2018
Hermetically sealed MEMS device and its fabrication
TEXAS INSTRUMENTS INC0 citations50
US9796585B2Oct 24, 2017
Leak detection using cavity surface quality factor
TEXAS INSTRUMENTS INC1 citations50