Inventor
PARTLO WILLIAM N
US166 patents
⚠️ This page may combine multiple inventors who share the name “PARTLO WILLIAM N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
47 patentsUS7196342B2Mar 27, 2007
Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source
CYMER INC284 citations99
US6566667B1May 20, 2003
Plasma focus light source with improved pulse power system
CYMER INC185 citations99
US6567450B2May 20, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC265 citations99
US6549551B2Apr 15, 2003
Injection seeded laser with precise timing control
CYMER INC186 citations99
US6208674B1Mar 27, 2001
Laser chamber with fully integrated electrode feedthrough main insulator
CYMER INC187 citations99
US6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US6067311AMay 23, 2000
Excimer laser with pulse multiplier
CYMER INC224 citations99
US6064072AMay 16, 2000
Plasma focus high energy photon source
CYMER INC190 citations99
US6051841AApr 18, 2000
Plasma focus high energy photon source
CYMER INC139 citations99
US6016325AJan 18, 2000
Magnetic modulator voltage and temperature timing compensation circuit
CYMER INC179 citations99
US5729562AMar 17, 1998
Pulse power generating circuit with energy recovery
CYMER INC241 citations99
US6744060B2Jun 1, 2004
Pulse power system for extreme ultraviolet and x-ray sources
CYMER INC79 citations98
US6690704B2Feb 10, 2004
Control system for a two chamber gas discharge laser
CYMER INC128 citations98
US6625191B2Sep 23, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC236 citations98
US6538737B2Mar 25, 2003
High resolution etalon-grating spectrometer
CYMER INC109 citations98
US6477193B2Nov 5, 2002
Extreme repetition rate gas discharge laser with improved blower motor
CYMER INC155 citations98
US6452199B1Sep 17, 2002
Plasma focus high energy photon source with blast shield
CYMER INC134 citations98
US6381257B1Apr 30, 2002
Very narrow band injection seeded F2 lithography laser
CYMER INC106 citations98
US6370174B1Apr 9, 2002
Injection seeded F2 lithography laser
CYMER INC99 citations98
US6018537AJan 25, 2000
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC280 citations98
US5991324ANov 23, 1999
Reliable. modular, production quality narrow-band KRF excimer laser
CYMER INC196 citations98
US5936988AAug 10, 1999
High pulse rate pulse power system
CYMER INC154 citations98
US7671349B2Mar 2, 2010
Laser produced plasma EUV light source
CYMER INC54 citations97
US7217940B2May 15, 2007
Collector for EUV light source
CYMER INC60 citations97
US7164144B2Jan 16, 2007
EUV light source
CYMER INC113 citations97
US7087914B2Aug 8, 2006
High repetition rate laser produced plasma EUV light source
CYMER INC109 citations97
US6972421B2Dec 6, 2005
Extreme ultraviolet light source
CYMER INC141 citations97
US6815700B2Nov 9, 2004
Plasma focus light source with improved pulse power system
CYMER INC113 citations97
US6757316B2Jun 29, 2004
Four KHz gas discharge laser
CYMER INC97 citations97
US6566668B2May 20, 2003
Plasma focus light source with tandem ellipsoidal mirror units
CYMER INC131 citations97
US6532247B2Mar 11, 2003
Laser wavelength control unit with piezoelectric driver
CYMER INC79 citations97
US6359922B1Mar 19, 2002
Single chamber gas discharge laser with line narrowed seed beam
CYMER INC102 citations97
US6330261B1Dec 11, 2001
Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
CYMER INC105 citations97
US6317447B1Nov 13, 2001
Electric discharge laser with acoustic chirp correction
CYMER INC108 citations97
US6151346ANov 21, 2000
High pulse rate pulse power system with fast rise time and low current
CYMER INC89 citations97
US7642533B2Jan 5, 2010
Extreme ultraviolet light source
CYMER INC36 citations96
US7368741B2May 6, 2008
Extreme ultraviolet light source
CYMER INC65 citations96
US7361918B2Apr 22, 2008
High repetition rate laser produced plasma EUV light source
CYMER INC35 citations96
US7317196B2Jan 8, 2008
LPP EUV light source
CYMER INC54 citations96
US7154928B2Dec 26, 2006
Laser output beam wavefront splitter for bandwidth spectrum control
CYMER INC62 citations96
US7009140B2Mar 7, 2006
Laser thin film poly-silicon annealing optical system
CYMER INC57 citations96
US6586757B2Jul 1, 2003
Plasma focus light source with active and buffer gas control
CYMER INC139 citations96
US6541786B1Apr 1, 2003
Plasma pinch high energy with debris collector
CYMER INC73 citations96
US5949806ASep 7, 1999
High voltage cable interlock circuit
CYMER INC54 citations96
US5940421AAug 17, 1999
Current reversal prevention circuit for a pulsed gas discharge laser
CYMER INC77 citations96
US5684822ANov 4, 1997
Laser system with anamorphic confocal unstable resonator
CYMER INC76 citations96
US6904073B2Jun 7, 2005
High power deep ultraviolet laser with long life optics
CYMER INC78 citations95
UNIV CALIFORNIA
1 patentTCZ LLC
1 patentTCZ GMBH
1 patentShowing the top 50 of 166 patents by PatentIndex Score.