Inventor
NOTTBOHM CHRISTOPH
DE5 patents
⚠️ This page may combine multiple inventors who share the name “NOTTBOHM CHRISTOPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
4 patentsUS11099484B2Aug 24, 2021
Method for repairing reflective optical elements for EUV lithography
ZEISS CARL SMT GMBH0 citations59
US12406777B2Sep 2, 2025
Optical element for a EUV projection exposure system
ZEISS CARL SMT GMBH0 citations54
US11073766B2Jul 27, 2021
Reflective optical element and optical system for EUV lithography having proportions of substances which differ across a surface
ZEISS CARL SMT GMBH0 citations45
US10598921B2Mar 24, 2020
Mirror element, in particular for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations39