Inventor
HUANG YAN-JHI
TW6 patents
Patents
6 patentsUS9818613B1Nov 14, 2017
Self-aligned double spacer patterning process
TAIWAN SEMICONDUCTOR MFG CO LTD17 citations91
US10157776B2Dec 18, 2018
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations82
US10056258B2Aug 21, 2018
Self-aligned double spacer patterning process
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11355388B2Jun 7, 2022
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12112979B2Oct 8, 2024
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10804142B2Oct 13, 2020
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50