Inventor
ELAZHARY TAMER MOHAMED TAWFIK AHMED MOHAMED
US10 patents
⚠️ This page may combine multiple inventors who share the name “ELAZHARY TAMER MOHAMED TAWFIK AHMED MOHAMED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
7 patentsUS12140872B2Nov 12, 2024
Optical designs of miniaturized overlay measurement system
ASML HOLDING NV0 citations61
US12066762B2Aug 20, 2024
On chip sensor for wafer overlay measurement
ASML HOLDING NV1 citations61
US11789368B2Oct 17, 2023
Lithographic apparatus, metrology system, and illumination systems with structured illumination
ASML HOLDING NV0 citations61
US11531280B2Dec 20, 2022
Compact alignment sensor arrangements
ASML HOLDING NV1 citations61
US11526091B2Dec 13, 2022
Sensor apparatus and method for lithographic measurements
ASML HOLDING NV1 citations59
US12585201B2Mar 24, 2026
Metrology mark structure and method of determining metrology mark structure
ASML HOLDING NV0 citations51
US12487081B2Dec 2, 2025
On chip wafer alignment sensor
ASML HOLDING NV0 citations49