Inventor
SAKURAI HIROKI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “SAKURAI HIROKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS12027394B2Jul 2, 2024
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD1 citations71
US11676835B2Jun 13, 2023
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD2 citations71
US12400882B2Aug 26, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations62
US11862474B2Jan 2, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD1 citations62
US11437251B2Sep 6, 2022
Substrate processing apparatus for producing mixed processing liquid
TOKYO ELECTRON LTD1 citations62
US12588461B2Mar 24, 2026
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US12051605B2Jul 30, 2024
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations51
US12044973B2Jul 23, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations51
US11955352B2Apr 9, 2024
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US12007692B2Jun 11, 2024
Nozzle, substrate processing apparatus, and substrate processing method
TOKYO ELECTRON LTD0 citations47
US12424459B2Sep 23, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations45