Inventor
SANGAM KEDARNATH
US18 patents
⚠️ This page may combine multiple inventors who share the name “SANGAM KEDARNATH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7794544B2Sep 14, 2010
Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system
APPLIED MATERIALS INC49 citations95
US8382897B2Feb 26, 2013
Process gas delivery for semiconductor process chambers
APPLIED MATERIALS INC21 citations92
US8698049B2Apr 15, 2014
Rapid thermal processing lamphead with improved cooling
APPLIED MATERIALS INC6 citations84
US8888916B2Nov 18, 2014
Thermal reactor with improved gas flow distribution
APPLIED MATERIALS INC6 citations82
US8377213B2Feb 19, 2013
Slit valve having increased flow uniformity
APPLIED MATERIALS INC4 citations59
US9423042B2Aug 23, 2016
Slit valve having increased flow uniformity
APPLIED MATERIALS INC0 citations49
KOELMEL BLAKE
3 patentsUS8057602B2Nov 15, 2011
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE63 citations97
US8057601B2Nov 15, 2011
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE11 citations84
US8490660B2Jul 23, 2013
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE3 citations62