Inventor
RAVI TIRUNELVELI S
US31 patents
⚠️ This page may combine multiple inventors who share the name “RAVI TIRUNELVELI S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS5807785ASep 15, 1998
Low dielectric constant silicon dioxide sandwich layer
APPLIED MATERIALS INC163 citations99
US6060397AMay 9, 2000
Gas chemistry for improved in-situ cleaning of residue for a CVD apparatus
APPLIED MATERIALS INC107 citations94
US6638886B1Oct 28, 2003
Plasma fluorine resistant alumina ceramic material and method of making
APPLIED MATERIALS INC19 citations93
US6132517AOct 17, 2000
Multiple substrate processing apparatus for enhanced throughput
APPLIED MATERIALS INC27 citations93
US6083451AJul 4, 2000
Method of producing a polycrystalline alumina ceramic which is resistant to a fluorine-comprising plasma
APPLIED MATERIALS INC18 citations93
US6051284AApr 18, 2000
Chamber monitoring and adjustment by plasma RF metrology
APPLIED MATERIALS INC53 citations93
SVAGOS TECHNIK INC
5 patentsUS11111600B1Sep 7, 2021
Process chamber with resistive heating
SVAGOS TECHNIK INC6 citations72
US10947640B1Mar 16, 2021
CVD reactor chamber with resistive heating for silicon carbide deposition
SVAGOS TECHNIK INC6 citations72
US10961621B2Mar 30, 2021
CVD reactor chamber with resistive heating and substrate holder
SVAGOS TECHNIK INC2 citations67
US11041253B2Jun 22, 2021
Silicon wafers by epitaxial deposition
SVAGOS TECHNIK INC0 citations60
US10847421B2Nov 24, 2020
Semiconductor layer separation from single crystal silicon substrate by infrared irradiation of porous silicon separation layer
SVAGOS TECHNIK INC0 citations34
CRYSTAL SOLAR INC
4 patentsUS8030119B2Oct 4, 2011
Integrated method and system for manufacturing monolithic panels of crystalline solar cells
CRYSTAL SOLAR INC6 citations71
US9455360B2Sep 27, 2016
Method of fabricating a metal wrap through solar cell
CRYSTAL SOLAR INC0 citations50
US9397239B2Jul 19, 2016
Insitu epitaxial deposition of front and back junctions in single crystal silicon solar cells
CRYSTAL SOLAR INC0 citations49
US8663753B2Mar 4, 2014
High throughput multi-wafer epitaxial reactor
CRYSTAL SOLAR INC0 citations47
Crystal Solar Incorporated
3 patentsUS9920451B2Mar 20, 2018
High throughput multi-wafer epitaxial reactor
Crystal Solar Incorporated339 citations97
US9982363B2May 29, 2018
Silicon wafers by epitaxial deposition
Crystal Solar Incorporated1 citations60
US9556522B2Jan 31, 2017
High throughput multi-wafer epitaxial reactor
Crystal Solar Incorporated0 citations50
BELL COMMUNICATIONS RES
3 patentsUS5266530ANov 30, 1993
Self-aligned gated electron field emitter
BELL COMMUNICATIONS RES90 citations96
US5204581AApr 20, 1993
Device including a tapered microminiature silicon structure
BELL COMMUNICATIONS RES59 citations96
US5100355AMar 31, 1992
Microminiature tapered all-metal structures
BELL COMMUNICATIONS RES51 citations92
SIVARAMAKRISHNAN VISWESWAREN
3 patentsUS9255346B2Feb 9, 2016
Silicon wafers by epitaxial deposition
SIVARAMAKRISHNAN VISWESWAREN5 citations82
US8673081B2Mar 18, 2014
High throughput multi-wafer epitaxial reactor
SIVARAMAKRISHNAN VISWESWAREN11 citations82
US8298629B2Oct 30, 2012
High throughput multi-wafer epitaxial reactor
SIVARAMAKRISHNAN VISWESWAREN5 citations72