Inventor
KASZUBA ANDRZEJ
US17 patents
⚠️ This page may combine multiple inventors who share the name “KASZUBA ANDRZEJ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7964858B2Jun 21, 2011
Ultraviolet reflector with coolant gas holes and method
APPLIED MATERIALS INC21 citations92
US7663121B2Feb 16, 2010
High efficiency UV curing system
APPLIED MATERIALS INC38 citations92
US7628863B2Dec 8, 2009
Heated gas box for PECVD applications
APPLIED MATERIALS INC20 citations90
US7582167B2Sep 1, 2009
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
APPLIED MATERIALS INC15 citations83
US7279049B2Oct 9, 2007
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support
APPLIED MATERIALS INC7 citations72
US7554103B2Jun 30, 2009
Increased tool utilization/reduction in MWBC for UV curing chamber
APPLIED MATERIALS INC5 citations62
Crystal Solar Incorporated
3 patentsUS9920451B2Mar 20, 2018
High throughput multi-wafer epitaxial reactor
Crystal Solar Incorporated339 citations97
US9982363B2May 29, 2018
Silicon wafers by epitaxial deposition
Crystal Solar Incorporated1 citations60
US9556522B2Jan 31, 2017
High throughput multi-wafer epitaxial reactor
Crystal Solar Incorporated0 citations50
SIVARAMAKRISHNAN VISWESWAREN
3 patentsUS9255346B2Feb 9, 2016
Silicon wafers by epitaxial deposition
SIVARAMAKRISHNAN VISWESWAREN5 citations82
US8673081B2Mar 18, 2014
High throughput multi-wafer epitaxial reactor
SIVARAMAKRISHNAN VISWESWAREN11 citations82
US8298629B2Oct 30, 2012
High throughput multi-wafer epitaxial reactor
SIVARAMAKRISHNAN VISWESWAREN5 citations72