Inventor

HAWKINS MARK

US19 patents

⚠️ This page may combine multiple inventors who share the name “HAWKINS MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HAWKINS MARK

ASM INC

Process for deposition of semiconductor films

Process for deposition of semiconductor films

Substrate holder with deep annular groove to prevent edge heat loss

Substrate support system for reduced autodoping and backside deposition

Calibration of temperature control system for semiconductor processing chamber

Localized heating of substrates using optics

Process for deposition of semiconductor films

ASM IP HOLDING BV

Gas distribution system, reactor including the system, and methods of using the same

Gas distribution system, reactor including the system, and methods of using the same

Susceptor with ring to limit backside deposition

Reactor system and method to reduce residue buildup during a film deposition process

Reactor system and method to reduce residue buildup during a film deposition process

NAZTEC INC

Wireless vehicle detection system and associated methods having enhanced response time

Wireless vehicle detection system and associated methods having enhanced response time

Wireless vehicle detector aggregator and interface to controller and associated methods

GOODMAN MATT G

Substrate support system for reduced autodoping and backside deposition

TRAFFICWARE GROUP INC

Wireless vehicle detection system and associated methods having enhanced response time

HAWKINS MARK

Susceptor with ring to limit backside deposition

US GOV AIR FORCE

Breath sample device including flow regulation device for volatile and semi-volatile sampling