Inventor
SOLTZ DAVID
US5 patents
⚠️ This page may combine multiple inventors who share the name “SOLTZ DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
3 patentsUS7304302B1Dec 4, 2007
Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis
KLA TENCOR TECH CORP55 citations92
US7394067B1Jul 1, 2008
Systems and methods for reducing alteration of a specimen during analysis for charged particle based and other measurement systems
KLA TENCOR TECH CORP34 citations87
US7148073B1Dec 12, 2006
Methods and systems for preparing a copper containing substrate for analysis
KLA TENCOR TECH CORP24 citations87