Inventor

BASOL BULENT M

US149 patents

⚠️ This page may combine multiple inventors who share the name “BASOL BULENT M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BASOL BULENT M

NUTOOL INC

Method for electrochemically processing a workpiece

Device providing electrical contact to the surface of a semiconductor workpiece during metal plating

Method and system to provide electroplanarization of a workpiece with a conducting material layer

Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing

Method and apparatus for electrodeposition of uniform film with minimal edge exclusion on substrate

Method and apparatus for filling low aspect ratio cavities with conductive material at high rate

Electrochemical edge and bevel cleaning process and system

Method and structure for thru-mask contact electrodeposition

Advanced chemical mechanical polishing system with smart endpoint detection

Chemical mechanical polishing endpoint detection

Carrier head for holding a wafer and allowing processing on a front face thereof to occur

Method and apparatus for full surface electrotreating of a wafer

Apparatus for controlling thickness uniformity of electroplated and electroetched layers

ASM NUTOOL INC

Fabrication of semiconductor interconnect structures

Method and structure to improve reliability of copper interconnects

Method and apparatus for processing a substrate with minimal edge exclusion

Electroetching process and system

Advanced chemical mechanical polishing system with smart endpoint detection

Electrochemical edge and bevel cleaning process and system

Multi step electrodeposition process for reducing defects and minimizing film thickness

Defect-free thin and planar film processing

Planarity detection methods and apparatus for electrochemical mechanical processing systems

Plating method and apparatus for controlling deposition on predetermined portions of a workpiece

Method and apparatus of sealing wafer backside for full-face electrochemical plating

Advanced chemical mechanical polishing system with smart endpoint detection

SOLOPOWER INC

Thin film solar cell with finger pattern

Thin film solar cell manufacturing and integration

Technique and apparatus for depositing layers of semiconductors for solar cell and module fabrication

Technique and apparatus for depositing thin layers of semiconductors for solar cell fabrication

Semitransparent flexible thin film solar cells and modules

Method and apparatus for continuous processing of buffer layers for group IBIIIAVIA solar cells

Efficient gallium thin film electroplating methods and chemistries

BASOL BULENT M

Method of forming semiconductor compound film for fabrication of electronic device and film produced by same

Photovoltaic modules with improved reliability

Low temperature nano particle preparation and deposition for phase-controlled compound film formation

Method of fabricating solar cells with electrodeposited compound interface layers

Method for forming copper indium gallium chalcogenide layer with shaped gallium profile

Method of forming back contact to a cadmium telluride solar cell

Roll-to-roll integration of thin film solar modules

INT SOLAR ELECTRIC TECHNOLOGY

Group I-III-VI2 semiconductor films for solar cell application

Method and making group IIB metal - telluride films and solar cells

Method of making compound semiconductor films and making related electronic devices

STANDARD OIL CO OHIO

Stable contact between current collector grid and transparent conductive layer

Stable front contact current collector for photovoltaic devices and method of making same

MONOSOLAR INC

Thin film heterojunction photovoltaic cells and methods of making the same

Method of forming ohmic contacts

NOVELLUS SYSTEMS INC

Method of making rolling electrical contact to wafer front surface

Device providing electrical contact to the surface of a semiconductor workpiece during processing

INT SOLAR ELECTRONIC TECHNOLOG

Oxide-based method of making compound semiconductor films and making related electronic devices

SOHIO COMMERCIAL DEV CO

Method of making current collector grid and materials therefor