Inventor
PRASAD BHASKAR
IN19 patents
Patents
19 patentsUS11817331B2Nov 14, 2023
Substrate holder replacement with protective disk during pasting process
APPLIED MATERIALS INC2 citations72
US11749542B2Sep 5, 2023
Apparatus, system, and method for non-contact temperature monitoring of substrate supports
APPLIED MATERIALS INC3 citations72
US11600507B2Mar 7, 2023
Pedestal assembly for a substrate processing chamber
APPLIED MATERIALS INC2 citations72
US12347719B2Jul 1, 2025
Floating pin for substrate transfer
APPLIED MATERIALS INC3 citations71
US11610799B2Mar 21, 2023
Electrostatic chuck having a heating and chucking capabilities
APPLIED MATERIALS INC2 citations69
US12266551B2Apr 1, 2025
Apparatus, system, and method for non-contact temperature monitoring of substrate supports
APPLIED MATERIALS INC0 citations62
USD1118552SMar 17, 2026
Substrate carrier
APPLIED MATERIALS INC0 citations61
US12581901B2Mar 17, 2026
Semiconductor process equipment
APPLIED MATERIALS INC0 citations61
US12581900B2Mar 17, 2026
Semiconductor process equipment
APPLIED MATERIALS INC0 citations61
US12568796B2Mar 3, 2026
Semiconductor process equipment
APPLIED MATERIALS INC0 citations61
US12494395B2Dec 9, 2025
Apparatus for controlling lift pin movement
APPLIED MATERIALS INC0 citations61
US12381101B2Aug 5, 2025
Semiconductor process equipment
APPLIED MATERIALS INC0 citations61
US12217982B2Feb 4, 2025
Isolated volume seals and method of forming an isolated volume within a processing chamber
APPLIED MATERIALS INC0 citations61
US12100614B2Sep 24, 2024
Apparatus for controlling lift pin movement
APPLIED MATERIALS INC0 citations61
US11955355B2Apr 9, 2024
Isolated volume seals and method of forming an isolated volume within a processing chamber
APPLIED MATERIALS INC1 citations61
US11646217B2May 9, 2023
Transfer apparatus and substrate-supporting member
APPLIED MATERIALS INC0 citations61
US12529133B1Jan 20, 2026
Sputter system with magnet motion source
APPLIED MATERIALS INC0 citations56
US12512347B2Dec 30, 2025
Methods and apparatus for wafer detection
APPLIED MATERIALS INC0 citations51
US12195314B2Jan 14, 2025
Cathode exchange mechanism to improve preventative maintenance time for cluster system
APPLIED MATERIALS INC0 citations51