Inventor

DANDAVATE GAUTAM SHASHANK

US19 patents

⚠️ This page may combine multiple inventors who share the name “DANDAVATE GAUTAM SHASHANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DANDAVATE GAUTAM SHASHANK

APPLIED MATERIALS INC

Retaining ring having inner surfaces with facets

Retaining ring having inner surfaces with facets

Monitoring retaining ring thickness and pressure control

Retaining ring having inner surfaces with features

Inner retaining ring and outer retaining ring for carrier head

Inner retaining ring and outer retaining ring for carrier head

Retaining ring having inner surfaces with facets

Retaining ring having inner surfaces with facets

Configurable pressure design for multizone chemical mechanical planarization polishing head

Retaining ring with selected stiffness and thickness

Retaining ring having inner surfaces with features

Retaining ring having inner surfaces with features

Inner retaining ring and outer retaining ring for carrier head

Retaining ring having inner surfaces with features

Retaining ring with selected stiffness and thickness

Polishing head zone boundary smoothing

CHEN HUNG CHIH

Carrier head with narrow inner ring and wide outer ring

Apparatus and method for temperature control during polishing

Polishing head zone boundary smoothing