Inventor
DIVAKAR RAMESH
US10 patents
⚠️ This page may combine multiple inventors who share the name “DIVAKAR RAMESH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAINT GOBAIN CERAMICS
4 patentsUS6606234B1Aug 12, 2003
Electrostatic chuck and method for forming an electrostatic chuck having porous regions for fluid flow
SAINT GOBAIN CERAMICS79 citations96
US6744618B2Jun 1, 2004
Electrostatic chucks with flat film electrode
SAINT GOBAIN CERAMICS28 citations91
US6723274B1Apr 20, 2004
High-purity low-resistivity electrostatic chucks
SAINT GOBAIN CERAMICS22 citations91
US6603650B1Aug 5, 2003
Electrostatic chuck susceptor and method for fabrication
SAINT GOBAIN CERAMICS5 citations61
CARBORUNDUM CO
4 patentsUS5834387ANov 10, 1998
Ceramic comprising silicon carbide with controlled porosity
CARBORUNDUM CO34 citations95
US5635430AJun 3, 1997
Intermediate for producing porous silicon carbide
CARBORUNDUM CO20 citations92
US5589428ADec 31, 1996
Silicon carbide with controlled porosity
CARBORUNDUM CO20 citations92
US5395807AMar 7, 1995
Process for making silicon carbide with controlled porosity
CARBORUNDUM CO34 citations92