Inventor
KO CHUNG-TING
TW69 patents
Patents
50 patentsUS10177038B1Jan 8, 2019
Prevention of contact bottom void in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD17 citations94
US9852947B1Dec 26, 2017
Forming sidewall spacers using isotropic etch
TAIWAN SEMICONDUCTOR MFG CO LTD28 citations94
US11271083B2Mar 8, 2022
Semiconductor device, FinFET device and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations85
US11437277B2Sep 6, 2022
Forming isolation regions for separating fins and gate stacks
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US11362003B2Jun 14, 2022
Prevention of contact bottom void in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations84
US10943818B2Mar 9, 2021
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations84
US10825737B2Nov 3, 2020
Prevention of contact bottom void in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US12112942B2Oct 8, 2024
Deposition process for forming semiconductor device and system
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US12027423B2Jul 2, 2024
Forming isolation regions for separating fins and gate stacks
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11830736B2Nov 28, 2023
Multi-layer photo etching mask including organic and inorganic materials
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10483168B2Nov 19, 2019
Low-k gate spacer and formation thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10157997B2Dec 18, 2018
FinFETs and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US12113113B2Oct 8, 2024
Semiconductor device with a core-shell feature and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US12087834B2Sep 10, 2024
Semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11888049B2Jan 30, 2024
Dielectric isolation structure for multi-gate transistors
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11855185B2Dec 26, 2023
Multilayer masking layer and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11728173B2Aug 15, 2023
Masking layer with post treatment
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11600530B2Mar 7, 2023
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11530479B2Dec 20, 2022
Atomic layer deposition tool and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10629693B2Apr 21, 2020
Semiconductor structure with barrier layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US12272553B2Apr 8, 2025
Multi-layer photo etching mask including organic and inorganic materials
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12112988B2Oct 8, 2024
Hybrid isolation regions having upper and lower portions with seams
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11837505B2Dec 5, 2023
Formation of hybrid isolation regions through recess and re-deposition
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US11532475B2Dec 20, 2022
Deposition process for forming semiconductor device and system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12593495B2Mar 31, 2026
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12543335B2Feb 3, 2026
Multilayer masking layer and method of forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12501690B2Dec 16, 2025
Hardmask formation with hybrid materials in semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12414353B2Sep 9, 2025
Method for forming semiconductor structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12328929B2Jun 10, 2025
Method of forming thin dummy sidewall spacers for transistors with reduced pitches
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12324185B2Jun 3, 2025
Semiconductor device, FinFET device and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12237393B2Feb 25, 2025
Method of fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12218241B2Feb 4, 2025
Semiconductor device structure with etch stop layer for reducing RC delay
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12094784B2Sep 17, 2024
Method for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12087641B2Sep 10, 2024
Method for forming semiconductor structure with fins using a multilayer mask structure for etching to form nanostructures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12080553B2Sep 3, 2024
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12062578B2Aug 13, 2024
Prevention of contact bottom void in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11984485B2May 14, 2024
Semiconductor device, FinFET device and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11948843B2Apr 2, 2024
Method for forming hardmask formation by hybrid materials in semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11810824B2Nov 7, 2023
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11532507B2Dec 20, 2022
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11417748B2Aug 16, 2022
Semiconductor device and method of fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11316047B2Apr 26, 2022
Structure and formation method of semiconductor device with monoatomic etch stop layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11296198B2Apr 5, 2022
Semiconductor structure with barrier layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11145746B2Oct 12, 2021
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10510867B2Dec 17, 2019
FinFETs and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10505021B2Dec 10, 2019
FinFet device and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12575355B2Mar 10, 2026
Masking layer with post treatment
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12376339B2Jul 29, 2025
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12349381B2Jul 1, 2025
Dielectric isolation structure for multi-gate transistors
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12166076B2Dec 10, 2024
Semiconductor device and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
Showing the top 50 of 69 patents by PatentIndex Score.