Inventor
HERRERA MANUEL
US5 patents
⚠️ This page may combine multiple inventors who share the name “HERRERA MANUEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS5433835AJul 18, 1995
Sputtering device and target with cover to hold cooling fluid
APPLIED MATERIALS INC115 citations98
US5603816AFeb 18, 1997
Sputtering device and target with cover to hold cooling fluid
APPLIED MATERIALS INC91 citations95
US5595337AJan 21, 1997
Sputtering device and target with cover to hold cooling fluid
APPLIED MATERIALS INC44 citations95