Inventor
HAUGAN KENNETH C
US6 patents
Patents
6 patentsUS5980706ANov 9, 1999
Electrode semiconductor workpiece holder
SEMITOOL INC73 citations92
US6001234ADec 14, 1999
Methods for plating semiconductor workpieces using a workpiece-engaging electrode assembly with sealing boot
SEMITOOL INC30 citations90
US6274013B1Aug 14, 2001
Electrode semiconductor workpiece holder
SEMITOOL INC21 citations88
US6461494B1Oct 8, 2002
Methods for plating semiconductor workpieces using a workpiece-engaging electrode assembly with sealing boot
SEMITOOL INC11 citations71
US6805778B1Oct 19, 2004
Contact assembly for supplying power to workpieces during electrochemical processing
SEMITOOL INC4 citations60
US6733649B2May 11, 2004
Electrochemical processing method
SEMITOOL INC0 citations48