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Inventor
RADLOFF LARRY R
US
3 patents
Patents
3 patents
US5980706A
Nov 9, 1999
Electrode semiconductor workpiece holder
SEMITOOL INC
73 citations
92
US6274013B1
Aug 14, 2001
Electrode semiconductor workpiece holder
SEMITOOL INC
21 citations
88
US6733649B2
May 11, 2004
Electrochemical processing method
SEMITOOL INC
0 citations
48