Inventor
LIN WEI-RAY
TW16 patents
⚠️ This page may combine multiple inventors who share the name “LIN WEI-RAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VANGUARD INT SEMICONDUCT CORP
10 patentsUS6261923B1Jul 17, 2001
Method to solve the dishing issue in CMP planarization by using a nitride hard mask for local inverse etchback and CMP
VANGUARD INT SEMICONDUCT CORP30 citations92
US6184081B1Feb 6, 2001
Method of fabricating a capacitor under bit line DRAM structure using contact hole liners
VANGUARD INT SEMICONDUCT CORP57 citations92
US6057210AMay 2, 2000
Method of making a shallow trench isolation for ULSI formation via in-direct CMP process
VANGUARD INT SEMICONDUCT CORP46 citations92
US6001704ADec 14, 1999
Method of fabricating a shallow trench isolation by using oxide/oxynitride layers
VANGUARD INT SEMICONDUCT CORP22 citations92
US6248643B1Jun 19, 2001
Method of fabricating a self-aligned contact
VANGUARD INT SEMICONDUCT CORP25 citations91
US6180489B1Jan 30, 2001
Formation of finely controlled shallow trench isolation for ULSI process
VANGUARD INT SEMICONDUCT CORP12 citations73
US6159821ADec 12, 2000
Methods for shallow trench isolation
VANGUARD INT SEMICONDUCT CORP10 citations73
US6117740ASep 12, 2000
Method of forming a shallow trench isolation by using PE-oxide and PE-nitride multi-layer
VANGUARD INT SEMICONDUCT CORP7 citations73
US6060348AMay 9, 2000
Method to fabricate isolation by combining locos and shallow trench isolation for ULSI technology
VANGUARD INT SEMICONDUCT CORP6 citations63
US6143664ANov 7, 2000
Method of planarizing a structure having an interpoly layer
VANGUARD INT SEMICONDUCT CORP2 citations62
NANYA TECHNOLOGY CORP
4 patentsUS6329241B1Dec 11, 2001
Methods for producing capacitor-node contact plugs of dynamic random-access memory
NANYA TECHNOLOGY CORP24 citations92
US6255161B1Jul 3, 2001
Method of forming a capacitor and a contact plug
NANYA TECHNOLOGY CORP32 citations92
US6187625B1Feb 13, 2001
Method of fabricating crown capacitor
NANYA TECHNOLOGY CORP17 citations84
US6130128AOct 10, 2000
Method of fabricating crown capacitor
NANYA TECHNOLOGY CORP18 citations83