Inventor

DENG XIAN-CAN

CN2 patents

Patents

2 patents

US6153530ANov 28, 2000

Post-etch treatment of plasma-etched feature surfaces to prevent corrosion

APPLIED MATERIALS INC58 citations94

US5866483AFeb 2, 1999

Method for anisotropically etching tungsten using SF6, CHF3, and N2

APPLIED MATERIALS INC254 citations93