Inventor

FALLER REBECCA

US6 patents

⚠️ This page may combine multiple inventors who share the name “FALLER REBECCA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED TECH MATERIALS

5 patents

US6749671B2Jun 15, 2004

Abatement of effluents from chemical vapor deposition processes using organometallic source reagents

ADVANCED TECH MATERIALS395 citations98

US6500487B1Dec 31, 2002

Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions

ADVANCED TECH MATERIALS417 citations98

US6537353B2Mar 25, 2003

Abatement of effluents from chemical vapor deposition processes using organometallic source reagents

ADVANCED TECH MATERIALS17 citations92

US6491884B1Dec 10, 2002

In-situ air oxidation treatment of MOCVD process effluent

ADVANCED TECH MATERIALS32 citations92

US6391385B1May 21, 2002

Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents

ADVANCED TECH MATERIALS17 citations92

ADANCED TECHNOLOGY MATERIALS I

1 patent

US6833024B2Dec 21, 2004

Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions

ADANCED TECHNOLOGY MATERIALS I383 citations96