Inventor
HOLST MARK
US18 patents
⚠️ This page may combine multiple inventors who share the name “HOLST MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
7 patentsUS6749671B2Jun 15, 2004
Abatement of effluents from chemical vapor deposition processes using organometallic source reagents
ADVANCED TECH MATERIALS395 citations98
US6500487B1Dec 31, 2002
Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions
ADVANCED TECH MATERIALS417 citations98
US6537353B2Mar 25, 2003
Abatement of effluents from chemical vapor deposition processes using organometallic source reagents
ADVANCED TECH MATERIALS17 citations92
US6491884B1Dec 10, 2002
In-situ air oxidation treatment of MOCVD process effluent
ADVANCED TECH MATERIALS32 citations92
US6391385B1May 21, 2002
Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents
ADVANCED TECH MATERIALS17 citations92
US6333010B1Dec 25, 2001
Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
ADVANCED TECH MATERIALS33 citations92
US6759018B1Jul 6, 2004
Method for point-of-use treatment of effluent gas streams
ADVANCED TECH MATERIALS62 citations91
ATMI ECOSYS CORP
5 patentsUS5955037ASep 21, 1999
Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
ATMI ECOSYS CORP156 citations97
US5935283AAug 10, 1999
Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
ATMI ECOSYS CORP85 citations95
US5846275ADec 8, 1998
Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
ATMI ECOSYS CORP64 citations95
US5833888ANov 10, 1998
Weeping weir gas/liquid interface structure
ATMI ECOSYS CORP53 citations91
US5882366AMar 16, 1999
Alternating wash/dry water scrubber entry
ATMI ECOSYS CORP13 citations66
THERMATRIX INC
2 patentsAPPLIED MATERIALS INC
2 patentsUS7695700B2Apr 13, 2010
Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
APPLIED MATERIALS INC11 citations92
US7214349B2May 8, 2007
Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
APPLIED MATERIALS INC24 citations92