Inventor
AEGERTER BRIAN K
US3 patents
Patents
3 patentsUS6632292B1Oct 14, 2003
Selective treatment of microelectronic workpiece surfaces
SEMITOOL INC62 citations94
US7399713B2Jul 15, 2008
Selective treatment of microelectric workpiece surfaces
SEMITOOL INC26 citations91
US7429537B2Sep 30, 2008
Methods and apparatus for rinsing and drying
SEMITOOL INC11 citations82