Inventor
DUNDAS CURT T
US8 patents
Patents
8 patentsUS6423642B1Jul 23, 2002
Reactor for processing a semiconductor wafer
SEMITOOL INC78 citations96
US6413436B1Jul 2, 2002
Selective treatment of the surface of a microelectronic workpiece
SEMITOOL INC61 citations95
US6632292B1Oct 14, 2003
Selective treatment of microelectronic workpiece surfaces
SEMITOOL INC62 citations94
US6794291B2Sep 21, 2004
Reactor for processing a semiconductor wafer
SEMITOOL INC13 citations92
US7399713B2Jul 15, 2008
Selective treatment of microelectric workpiece surfaces
SEMITOOL INC26 citations91
US7429537B2Sep 30, 2008
Methods and apparatus for rinsing and drying
SEMITOOL INC11 citations82
US6692613B2Feb 17, 2004
Reactor for processing a semiconductor wafer
SEMITOOL INC11 citations73
US6447633B1Sep 10, 2002
Reactor for processing a semiconductor wafer
SEMITOOL INC10 citations73