Inventor
WILSON LAUREN
US15 patents
⚠️ This page may combine multiple inventors who share the name “WILSON LAUREN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
10 patentsUS9263238B2Feb 16, 2016
Open plasma lamp for forming a light-sustained plasma
KLA TENCOR CORP10 citations84
US9721761B2Aug 1, 2017
Open plasma lamp for forming a light-sustained plasma
KLA TENCOR CORP4 citations73
US10283342B2May 7, 2019
Laser sustained plasma light source with graded absorption features
KLA TENCOR CORP2 citations72
US10032620B2Jul 24, 2018
Broadband light source including transparent portion with high hydroxide content
KLA TENCOR CORP3 citations72
US9615439B2Apr 4, 2017
System and method for inhibiting radiative emission of a laser-sustained plasma source
KLA TENCOR CORP5 citations71
US9899205B2Feb 20, 2018
System and method for inhibiting VUV radiative emission of a laser-sustained plasma source
KLA TENCOR CORP2 citations69
US10522340B2Dec 31, 2019
Broadband light source including transparent portion with high hydroxide content
KLA TENCOR CORP0 citations51
US10495287B1Dec 3, 2019
Nanocrystal-based light source for sample characterization
KLA TENCOR CORP0 citations51
US9534848B2Jan 3, 2017
Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
KLA TENCOR CORP1 citations48
US10257918B2Apr 9, 2019
System and method for laser-sustained plasma illumination
KLA TENCOR CORP0 citations37