Inventor
BARNES STEPHEN MATTHEW
US15 patents
Patents
15 patentsUS6864618B2Mar 8, 2005
Method for operating a microelectromechanical system using a stiff coupling
MEMX INC57 citations96
US6640023B2Oct 28, 2003
Single chip optical cross connect
MEMX INC62 citations95
US6844657B2Jan 18, 2005
Microelectromechanical system and method for producing displacement multiplication
MEMX INC20 citations92
US6650806B2Nov 18, 2003
Compliant push/pull connector microstructure
MEMX INC21 citations92
US6747340B2Jun 8, 2004
Multi-level shielded multi-conductor interconnect bus for MEMS
MEMX INC16 citations84
US6731513B2May 4, 2004
Shielded multi-conductor interconnect bus for MEMS
MEMX INC13 citations84
US6847152B2Jan 25, 2005
Microelectromechnical system for tilting a platform
MEMX INC6 citations73
US6831391B2Dec 14, 2004
Microelectromechanical system for tilting a platform
MEMX INC4 citations73
US6665104B2Dec 16, 2003
Mirror positioning assembly with vertical force component compensation
MEMX INC10 citations73
US7055975B2Jun 6, 2006
Microelectromechanical system with non-collinear force compensation
MEMX INC2 citations62
US6841464B2Jan 11, 2005
Multi-level shielded multi-conductor interconnect bus for MEMS
MEMX INC2 citations62
US6831390B2Dec 14, 2004
Microelectromechanical system with stiff coupling
MEMX INC2 citations62
US6794793B2Sep 21, 2004
Microelectromechnical system for tilting a platform
MEMX INC1 citations62
US6774535B2Aug 10, 2004
Micromechanical platform pivotal on a compliant member
MEMX INC2 citations62
US6727436B2Apr 27, 2004
Interconnect bus crossover for MEMS
MEMX INC4 citations62