Inventor
HIJIKATA SHIGEAKI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “HIJIKATA SHIGEAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patentsUS6583414B2Jun 24, 2003
Method of inspecting pattern and inspecting instrument
HITACHI LTD52 citations96
US7112791B2Sep 26, 2006
Method of inspecting pattern and inspecting instrument
HITACHI LTD6 citations73
US6777677B2Aug 17, 2004
Method of inspecting pattern and inspecting instrument
HITACHI LTD8 citations73