Inventor
HA JAE-KYU
KR3 patents
Patents
3 patentsUS7531449B2May 12, 2009
Method of forming fine patterns using double patterning process
SAMSUNG ELECTRONICS CO LTD29 citations92
US7534704B2May 19, 2009
Thin layer structure and method of forming the same
SAMSUNG ELECTRONICS CO LTD5 citations61
US7235445B2Jun 26, 2007
Methods of forming device with recessed gate electrodes
SAMSUNG ELECTRONICS CO LTD3 citations60