Inventor
THEUER HEIKO
DE7 patents
Patents
7 patentsUS7693324B2Apr 6, 2010
Optical surface inspection
IBM9 citations82
US7342654B2Mar 11, 2008
Detection of impurities in cylindrically shaped transparent media
IBM11 citations82
US7397569B2Jul 8, 2008
Method and system for interferometric height measurement
IBM4 citations72
US7221459B2May 22, 2007
Method and system for interferometric height measurement
IBM6 citations72
US7130057B2Oct 31, 2006
Method and apparatus for controlling the position of a probe location relative to a fixed reference point of a probe processing equipment
IBM2 citations54
US7551291B2Jun 23, 2009
Interferometric height measurement
IBM0 citations51
US7551292B2Jun 23, 2009
Interferometric Height Measurement
IBM0 citations46