Inventor
HUEY SIDNEY P
US19 patents
⚠️ This page may combine multiple inventors who share the name “HUEY SIDNEY P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
17 patentsUS7927190B2Apr 19, 2011
Retaining ring with shaped surface
APPLIED MATERIALS INC9 citations92
US11710228B2Jul 25, 2023
Detecting an excursion of a CMP component using time-based sequence of images and machine learning
APPLIED MATERIALS INC5 citations85
US7952708B2May 31, 2011
High throughput measurement system
APPLIED MATERIALS INC13 citations84
US7840375B2Nov 23, 2010
Methods and apparatus for generating a library of spectra
APPLIED MATERIALS INC12 citations84
US10766117B2Sep 8, 2020
Retaining ring with shaped surface
APPLIED MATERIALS INC5 citations83
US9937601B2Apr 10, 2018
Retaining ring with Shaped Surface
APPLIED MATERIALS INC4 citations83
US9362186B2Jun 7, 2016
Polishing with eddy current feed meaurement prior to deposition of conductive layer
APPLIED MATERIALS INC10 citations83
US8372210B2Feb 12, 2013
Post CMP scrubbing of substrates
APPLIED MATERIALS INC15 citations82
US11260500B2Mar 1, 2022
Retaining ring with shaped surface
APPLIED MATERIALS INC4 citations72
US9811077B2Nov 7, 2017
Polishing with pre deposition spectrum
APPLIED MATERIALS INC2 citations72
US12548146B2Feb 10, 2026
Detecting an excursion of a CMP component using time-based sequence of images
APPLIED MATERIALS INC0 citations62
US12148149B2Nov 19, 2024
Training a machine learning system to detect an excursion of a CMP component using time-based sequence of images
APPLIED MATERIALS INC0 citations62
US12079984B2Sep 3, 2024
Detecting an excursion of a CMP component using time-based sequence of images
APPLIED MATERIALS INC0 citations62
US11850703B2Dec 26, 2023
Method of forming retaining ring with shaped surface
APPLIED MATERIALS INC0 citations62
US11577361B2Feb 14, 2023
Retaining ring with shaped surface and method of forming
APPLIED MATERIALS INC0 citations62
US9186773B2Nov 17, 2015
Retaining ring with shaped surface
APPLIED MATERIALS INC2 citations62
US10651098B2May 12, 2020
Polishing with measurement prior to deposition of outer layer
APPLIED MATERIALS INC0 citations51