Inventor
WOHLERT MARTIN S
US12 patents
⚠️ This page may combine multiple inventors who share the name “WOHLERT MARTIN S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS7927190B2Apr 19, 2011
Retaining ring with shaped surface
APPLIED MATERIALS INC9 citations92
US10766117B2Sep 8, 2020
Retaining ring with shaped surface
APPLIED MATERIALS INC5 citations83
US9937601B2Apr 10, 2018
Retaining ring with Shaped Surface
APPLIED MATERIALS INC4 citations83
US9412619B2Aug 9, 2016
Method of outgassing a mask material deposited over a workpiece in a process tool
APPLIED MATERIALS INC4 citations73
US11260500B2Mar 1, 2022
Retaining ring with shaped surface
APPLIED MATERIALS INC4 citations72
US7210988B2May 1, 2007
Method and apparatus for reduced wear polishing pad conditioning
APPLIED MATERIALS INC9 citations72
US11850703B2Dec 26, 2023
Method of forming retaining ring with shaped surface
APPLIED MATERIALS INC0 citations62
US11577361B2Feb 14, 2023
Retaining ring with shaped surface and method of forming
APPLIED MATERIALS INC0 citations62
US9186773B2Nov 17, 2015
Retaining ring with shaped surface
APPLIED MATERIALS INC2 citations62
US7879255B2Feb 1, 2011
Method and composition for electrochemically polishing a conductive material on a substrate
APPLIED MATERIALS INC1 citations50