Inventor
BALAGANI VENKATA R
US13 patents
⚠️ This page may combine multiple inventors who share the name “BALAGANI VENKATA R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS6945857B1Sep 20, 2005
Polishing pad conditioner and methods of manufacture and recycling
APPLIED MATERIALS INC111 citations97
US7344434B2Mar 18, 2008
Retaining ring with shaped surface
APPLIED MATERIALS INC33 citations94
US7066795B2Jun 27, 2006
Polishing pad conditioner with shaped abrasive patterns and channels
APPLIED MATERIALS INC87 citations94
US7927190B2Apr 19, 2011
Retaining ring with shaped surface
APPLIED MATERIALS INC9 citations92
US7182677B2Feb 27, 2007
Chemical mechanical polishing pad for controlling polishing slurry distribution
APPLIED MATERIALS INC19 citations87
US10766117B2Sep 8, 2020
Retaining ring with shaped surface
APPLIED MATERIALS INC5 citations83
US9937601B2Apr 10, 2018
Retaining ring with Shaped Surface
APPLIED MATERIALS INC4 citations83
US11260500B2Mar 1, 2022
Retaining ring with shaped surface
APPLIED MATERIALS INC4 citations72
US11850703B2Dec 26, 2023
Method of forming retaining ring with shaped surface
APPLIED MATERIALS INC0 citations62
US11577361B2Feb 14, 2023
Retaining ring with shaped surface and method of forming
APPLIED MATERIALS INC0 citations62
US9186773B2Nov 17, 2015
Retaining ring with shaped surface
APPLIED MATERIALS INC2 citations62