Inventor
ISE MASAFUMI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “ISE MASAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
3 patentsUS7657863B2Feb 2, 2010
Pattern area value calculating method, proximity effect correcting method, and charged particle beam writing method and apparatus
NUFLARE TECHNOLOGY INC11 citations82
US9899187B2Feb 20, 2018
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC4 citations71
US10937629B2Mar 2, 2021
Multi charged particle beam writing apparatus and multi charged particle beam writing method
NUFLARE TECHNOLOGY INC1 citations61