Inventor
NAMATSU HIDEO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NAMATSU HIDEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIPPON TELEGRAPH & TELEPHONE
10 patentsUS6576066B1Jun 10, 2003
Supercritical drying method and supercritical drying apparatus
NIPPON TELEGRAPH & TELEPHONE67 citations95
US6358673B1Mar 19, 2002
Pattern formation method and apparatus
NIPPON TELEGRAPH & TELEPHONE76 citations95
US6554507B2Apr 29, 2003
Pattern formation method and apparatus
NIPPON TELEGRAPH & TELEPHONE32 citations92
US5376590ADec 27, 1994
Semiconductor device and method of fabricating the same
NIPPON TELEGRAPH & TELEPHONE35 citations92
US4738916AApr 19, 1988
Intermediate layer material of three-layer resist system
NIPPON TELEGRAPH & TELEPHONE25 citations92
US4615782AOct 7, 1986
Intermediate layer material of three-layer resist system and method of forming resist pattern
NIPPON TELEGRAPH & TELEPHONE32 citations92
US5512513AApr 30, 1996
Method of fabricating semiconductor device with water protective film
NIPPON TELEGRAPH & TELEPHONE15 citations81
US5811872ASep 22, 1998
Semiconductor device and method of farbricating the same
NIPPON TELEGRAPH & TELEPHONE10 citations73
US8026047B2Sep 27, 2011
Resist pattern forming method, supercritical processing solution for lithography process, and antireflection film forming method
NIPPON TELEGRAPH & TELEPHONE3 citations62
US7977036B2Jul 12, 2011
Resist pattern forming method
NIPPON TELEGRAPH & TELEPHONE4 citations62