Inventor

TSENG EDWARD

TW3 patents

⚠️ This page may combine multiple inventors who share the name “TSENG EDWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HERMES MICROVISION INC

2 patents

US7825386B2Nov 2, 2010

System and method for a charged particle beam

HERMES MICROVISION INC16 citations92

US7919760B2Apr 5, 2011

Operation stage for wafer edge inspection and review

HERMES MICROVISION INC15 citations83

LIU XUEDONG

1 patent

US8164060B2Apr 24, 2012

System and method for a charged particle beam

LIU XUEDONG6 citations80