Inventor

HEGELE KLAUS

DE2 patents

⚠️ This page may combine multiple inventors who share the name “HEGELE KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL MICROSCOPY GMBH

1 patent

US9947504B2Apr 17, 2018

Particle beam apparatus and method for operating a particle beam apparatus

ZEISS CARL MICROSCOPY GMBH0 citations35

BIBERGER JOSEF

1 patent

US8471202B2Jun 25, 2013

Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method

BIBERGER JOSEF0 citations32