Inventor
YAMAMOTO HIDEYUKI
JP91 patents
⚠️ This page may combine multiple inventors who share the name “YAMAMOTO HIDEYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
26 patentsUS6755932B2Jun 29, 2004
Plasma processing system and apparatus and a sample processing method
HITACHI LTD290 citations98
US6618692B2Sep 9, 2003
Remote diagnostic system and method for semiconductor manufacturing equipment
HITACHI LTD140 citations98
US6590179B2Jul 8, 2003
Plasma processing apparatus and method
HITACHI LTD66 citations96
US7085827B2Aug 1, 2006
Integrated service management system for remote customer support
HITACHI LTD61 citations95
US7376479B2May 20, 2008
Process monitoring device for sample processing apparatus and control method of sample processing apparatus
HITACHI LTD15 citations93
US7158848B2Jan 2, 2007
Process monitoring device for sample processing apparatus and control method of sample processing apparatus
HITACHI LTD19 citations93
US7058467B2Jun 6, 2006
Process monitoring device for sample processing apparatus and control method of sample processing apparatus
HITACHI LTD16 citations93
US7058470B2Jun 6, 2006
Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor
HITACHI LTD11 citations93
US6903826B2Jun 7, 2005
Method and apparatus for determining endpoint of semiconductor element fabricating process
HITACHI LTD33 citations93
US6879867B2Apr 12, 2005
Process monitoring device for sample processing apparatus and control method of sample processing apparatus
HITACHI LTD25 citations93
US6745096B2Jun 1, 2004
Maintenance method and system for plasma processing apparatus etching and apparatus
HITACHI LTD18 citations93
US6706543B2Mar 16, 2004
Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a therefor
HITACHI LTD13 citations93
US6733618B2May 11, 2004
Disturbance-free, recipe-controlled plasma processing system and method
HITACHI LTD18 citations92
US6716301B2Apr 6, 2004
Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe
HITACHI LTD25 citations92
US7464152B2Dec 9, 2008
Integrated service management system for remote customer support
HITACHI LTD42 citations91
US7601240B2Oct 13, 2009
Disturbance-free, recipe-controlled plasma processing system and method
HITACHI LTD9 citations84
US6911157B2Jun 28, 2005
Plasma processing method and apparatus using dynamic sensing of a plasma environment
HITACHI LTD17 citations84
US6881352B2Apr 19, 2005
Disturbance-free, recipe-controlled plasma processing method
HITACHI LTD12 citations84
US6771481B2Aug 3, 2004
Plasma processing apparatus for processing semiconductor wafer using plasma
HITACHI LTD19 citations84
US7343217B2Mar 11, 2008
System for monitoring and controlling a semiconductor manufacturing apparatus using prediction model equation
HITACHI LTD4 citations74
US7126697B2Oct 24, 2006
Method and apparatus for determining endpoint of semiconductor element fabricating process
HITACHI LTD5 citations74
US7009715B2Mar 7, 2006
Method and apparatus for determining endpoint of semiconductor element fabricating process and method and apparatus for processing member to be processed
HITACHI LTD7 citations74
US6828165B2Dec 7, 2004
Semiconductor plasma processing apparatus with first and second processing state monitoring units
HITACHI LTD10 citations74
US6776872B2Aug 17, 2004
Data processing apparatus for semiconductor processing apparatus
HITACHI LTD7 citations74
US6747239B2Jun 8, 2004
Plasma processing apparatus and method
HITACHI LTD8 citations74
US6537012B2Mar 25, 2003
Vacuum processing apparatus and a vacuum processing system
HITACHI LTD11 citations74
HITACHI HIGH TECH CORP
8 patentsUS7107115B2Sep 12, 2006
Method for controlling semiconductor processing apparatus
HITACHI HIGH TECH CORP17 citations93
US6825617B2Nov 30, 2004
Semiconductor processing apparatus
HITACHI HIGH TECH CORP37 citations92
US7166480B2Jan 23, 2007
Particle control device and particle control method for vacuum processing apparatus
HITACHI HIGH TECH CORP10 citations84
US7010374B2Mar 7, 2006
Method for controlling semiconductor processing apparatus
HITACHI HIGH TECH CORP15 citations84
US6939435B1Sep 6, 2005
Plasma processing apparatus and processing method
HITACHI HIGH TECH CORP7 citations74
US6908529B2Jun 21, 2005
Plasma processing apparatus and method
HITACHI HIGH TECH CORP8 citations74
US6899766B2May 31, 2005
Diagnosis method for semiconductor processing apparatus
HITACHI HIGH TECH CORP6 citations74
US6866744B2Mar 15, 2005
Semiconductor processing apparatus and a diagnosis method therefor
HITACHI HIGH TECH CORP5 citations74
CASIO COMPUTER CO LTD
8 patentsUSD390800SFeb 17, 1998
Watch band
CASIO COMPUTER CO LTD19 citations93
USD349248SAug 2, 1994
Wrist watch
CASIO COMPUTER CO LTD23 citations93
USD394404SMay 19, 1998
Wrist watch
CASIO COMPUTER CO LTD20 citations92
USD378740SApr 8, 1997
Wrist watch
CASIO COMPUTER CO LTD19 citations92
USD327441SJun 30, 1992
Wrist watch
CASIO COMPUTER CO LTD43 citations92
USD401162SNov 17, 1998
Watch case with a protection device
CASIO COMPUTER CO LTD8 citations74
USD394610SMay 26, 1998
Watch case
CASIO COMPUTER CO LTD14 citations74
USD387292SDec 9, 1997
Wrist watch
CASIO COMPUTER CO LTD11 citations74
OSAKA TRANSFORMER CO LTD
2 patentsJP NAT RES INST FOR METALS
1 patentNIKKA LIMITED
1 patentTORAY INDUSTRIES
1 patentJP MINISTRY OF EDUCATION CULTU
1 patentHITCHI HIGH TECHNOLOGIES CORP
1 patentDAIHEN CORP
1 patentShowing the top 50 of 91 patents by PatentIndex Score.