P

Inventor

YAMAMOTO HIDEYUKI

JP91 patents
⚠️ This page may combine multiple inventors who share the name “YAMAMOTO HIDEYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

26 patents
US6755932B2Jun 29, 2004

Plasma processing system and apparatus and a sample processing method

HITACHI LTD290 citations98
US6618692B2Sep 9, 2003

Remote diagnostic system and method for semiconductor manufacturing equipment

HITACHI LTD140 citations98
US6590179B2Jul 8, 2003

Plasma processing apparatus and method

HITACHI LTD66 citations96
US7085827B2Aug 1, 2006

Integrated service management system for remote customer support

HITACHI LTD61 citations95
US7376479B2May 20, 2008

Process monitoring device for sample processing apparatus and control method of sample processing apparatus

HITACHI LTD15 citations93
US7158848B2Jan 2, 2007

Process monitoring device for sample processing apparatus and control method of sample processing apparatus

HITACHI LTD19 citations93
US7058467B2Jun 6, 2006

Process monitoring device for sample processing apparatus and control method of sample processing apparatus

HITACHI LTD16 citations93
US7058470B2Jun 6, 2006

Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor

HITACHI LTD11 citations93
US6903826B2Jun 7, 2005

Method and apparatus for determining endpoint of semiconductor element fabricating process

HITACHI LTD33 citations93
US6879867B2Apr 12, 2005

Process monitoring device for sample processing apparatus and control method of sample processing apparatus

HITACHI LTD25 citations93
US6745096B2Jun 1, 2004

Maintenance method and system for plasma processing apparatus etching and apparatus

HITACHI LTD18 citations93
US6706543B2Mar 16, 2004

Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a therefor

HITACHI LTD13 citations93
US6733618B2May 11, 2004

Disturbance-free, recipe-controlled plasma processing system and method

HITACHI LTD18 citations92
US6716301B2Apr 6, 2004

Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe

HITACHI LTD25 citations92
US7464152B2Dec 9, 2008

Integrated service management system for remote customer support

HITACHI LTD42 citations91
US7601240B2Oct 13, 2009

Disturbance-free, recipe-controlled plasma processing system and method

HITACHI LTD9 citations84
US6911157B2Jun 28, 2005

Plasma processing method and apparatus using dynamic sensing of a plasma environment

HITACHI LTD17 citations84
US6881352B2Apr 19, 2005

Disturbance-free, recipe-controlled plasma processing method

HITACHI LTD12 citations84
US6771481B2Aug 3, 2004

Plasma processing apparatus for processing semiconductor wafer using plasma

HITACHI LTD19 citations84
US7343217B2Mar 11, 2008

System for monitoring and controlling a semiconductor manufacturing apparatus using prediction model equation

HITACHI LTD4 citations74
US7126697B2Oct 24, 2006

Method and apparatus for determining endpoint of semiconductor element fabricating process

HITACHI LTD5 citations74
US7009715B2Mar 7, 2006

Method and apparatus for determining endpoint of semiconductor element fabricating process and method and apparatus for processing member to be processed

HITACHI LTD7 citations74
US6828165B2Dec 7, 2004

Semiconductor plasma processing apparatus with first and second processing state monitoring units

HITACHI LTD10 citations74
US6776872B2Aug 17, 2004

Data processing apparatus for semiconductor processing apparatus

HITACHI LTD7 citations74
US6747239B2Jun 8, 2004

Plasma processing apparatus and method

HITACHI LTD8 citations74
US6537012B2Mar 25, 2003

Vacuum processing apparatus and a vacuum processing system

HITACHI LTD11 citations74

HITACHI HIGH TECH CORP

8 patents

CASIO COMPUTER CO LTD

8 patents

OSAKA TRANSFORMER CO LTD

2 patents

JP NAT RES INST FOR METALS

1 patent

NIKKA LIMITED

1 patent

TORAY INDUSTRIES

1 patent

JP MINISTRY OF EDUCATION CULTU

1 patent

HITCHI HIGH TECHNOLOGIES CORP

1 patent

DAIHEN CORP

1 patent

Showing the top 50 of 91 patents by PatentIndex Score.