Inventor
PAN LUNG YUAN
TW10 patents
⚠️ This page may combine multiple inventors who share the name “PAN LUNG YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
7 patentsUS10266390B2Apr 23, 2019
Methods of forming micro-electro-mechanical devices including a conductive feature extending through an escort ring
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11387748B2Jul 12, 2022
Self-aligned dielectric liner structure for protection in MEMS comb actuator
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US11130670B2Sep 28, 2021
MEMS devices with an element having varying widths
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12170243B2Dec 17, 2024
Dielectric anchors for anchoring a conductive pillar
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12327723B2Jun 10, 2025
Passive cap for germanium-containing layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10269637B2Apr 23, 2019
Semiconductor structure and fabricating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12355370B2Jul 8, 2025
Self-aligned dielectric liner structure for protection in MEMS comb actuator
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50