Inventor
ARIMA SUSUMU
JP11 patents
⚠️ This page may combine multiple inventors who share the name “ARIMA SUSUMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS6966936B2Nov 22, 2005
Processing system, evacuating system for processing system, low-pressure CVD system, and evacuating system and trapping device for low-pressure CVD system
TOKYO ELECTRON LTD69 citations97
US6399484B1Jun 4, 2002
Semiconductor device fabricating method and system for carrying out the same
TOKYO ELECTRON LTD88 citations97
US6797068B1Sep 28, 2004
Film forming unit
TOKYO ELECTRON LTD22 citations92
US10886170B2Jan 5, 2021
Method of forming tungsten film
TOKYO ELECTRON LTD0 citations62
US10612139B2Apr 7, 2020
Method of forming a tungsten film having a low resistance
TOKYO ELECTRON LTD0 citations51
US8372688B2Feb 12, 2013
Method for forming Ge-Sb-Te film and storage medium
TOKYO ELECTRON LTD1 citations51
US7361595B2Apr 22, 2008
Transition metal thin film forming method
TOKYO ELECTRON LTD0 citations51
US9246098B2Jan 26, 2016
Ge—Sb—Te film forming method, Ge—Te film forming method, and Sb—Te film forming method
TOKYO ELECTRON LTD0 citations41