Inventor
EGASHIRA KOJI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “EGASHIRA KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS8002511B2Aug 23, 2011
Batch forming apparatus, substrate processing system, batch forming method, and storage medium
TOKYO ELECTRON LTD21 citations92
US6568412B2May 27, 2003
Rotary processing apparatus with holding bars having drain grooves
TOKYO ELECTRON LTD21 citations92
US6698439B2Mar 2, 2004
Processing apparatus with sealing mechanism
TOKYO ELECTRON LTD19 citations84
US6725868B2Apr 27, 2004
Liquid processing apparatus
TOKYO ELECTRON LTD10 citations74
US6663721B2Dec 16, 2003
Liquid processing apparatus and method
TOKYO ELECTRON LTD7 citations74
US6743297B2Jun 1, 2004
Rotary substrate processing apparatus and method
TOKYO ELECTRON LTD7 citations72
US7412981B2Aug 19, 2008
Liquid processing apparatus and method
TOKYO ELECTRON LTD3 citations63
US7314054B2Jan 1, 2008
Liquid processing apparatus with nozzle having planar ejecting orifices
TOKYO ELECTRON LTD2 citations63
US7240680B2Jul 10, 2007
Substrate processing apparatus
TOKYO ELECTRON LTD3 citations62
US9305818B2Apr 5, 2016
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations51
US7347214B2Mar 25, 2008
Rotary shaft sealing mechanism and liquid processing apparatus
TOKYO ELECTRON LTD1 citations49
US9452452B2Sep 27, 2016
Liquid processing apparatus
TOKYO ELECTRON LTD0 citations41
US9272310B2Mar 1, 2016
Liquid processing apparatus
TOKYO ELECTRON LTD0 citations41
TONEN SEKIYUKAGAKU KK
3 patentsUS5106564AApr 21, 1992
Method of and apparatus for making fiber-reinforced polymer compositions
TONEN SEKIYUKAGAKU KK27 citations91
US4990550AFeb 5, 1991
Fiber-reinforced polymer composition and method of producing same
TONEN SEKIYUKAGAKU KK34 citations91
US5106893AApr 21, 1992
Fiber-reinforced polymer composition
TONEN SEKIYUKAGAKU KK7 citations73