Inventor
ANIKITCHEV SERGUEI
US19 patents
⚠️ This page may combine multiple inventors who share the name “ANIKITCHEV SERGUEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULTRATECH INC
11 patentsUS8014427B1Sep 6, 2011
Line imaging systems and methods for laser annealing
ULTRATECH INC33 citations92
US8026519B1Sep 27, 2011
Systems and methods for forming a time-averaged line image
ULTRATECH INC20 citations90
US8865603B2Oct 21, 2014
Laser annealing systems and methods with ultra-short dwell times
ULTRATECH INC7 citations84
US10083843B2Sep 25, 2018
Laser annealing systems and methods with ultra-short dwell times
ULTRATECH INC4 citations73
US9613815B2Apr 4, 2017
High-efficiency line-forming optical systems and methods for defect annealing and dopant activation
ULTRATECH INC3 citations73
US10353208B2Jul 16, 2019
High-efficiency line-forming optical systems and methods using a serrated spatial filter
ULTRATECH INC2 citations72
US9411163B2Aug 9, 2016
High-efficiency line-forming optical systems and methods
ULTRATECH INC5 citations72
US9343307B2May 17, 2016
Laser spike annealing using fiber lasers
ULTRATECH INC3 citations72
US8988674B2Mar 24, 2015
Systems and methods for measuring high-intensity light beams
ULTRATECH INC4 citations71
US9711361B2Jul 18, 2017
High-efficiency line-forming optical systems and methods for defect annealing and dopant activation
ULTRATECH INC0 citations52
US9638922B2May 2, 2017
High-efficiency line-forming optical systems and methods
ULTRATECH INC0 citations51
VEECO INSTR INC
3 patentsUS10847381B2Nov 24, 2020
Laser annealing systems and methods with ultra-short dwell times
VEECO INSTR INC2 citations73
US10665504B2May 26, 2020
Laser-based systems and methods for melt-processing of metal layers in semiconductor manufacturing
VEECO INSTR INC2 citations73
US11415809B2Aug 16, 2022
High-efficiency line-forming optical systems and methods using a serrated spatial filter
VEECO INSTR INC0 citations62