Inventor
FURUICHI MASATOSHI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “FURUICHI MASATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
YASKAWA DENKI SEISAKUSHO KK
9 patentsUS9252035B2Feb 2, 2016
Substrate transfer system, substrate processing system, and substrate transfer robot
YASKAWA DENKI SEISAKUSHO KK5 citations83
US9108320B2Aug 18, 2015
Suction structure, robot hand and robot
YASKAWA DENKI SEISAKUSHO KK11 citations82
US7956286B2Jun 7, 2011
Cable handling structure for linear axis, and substrate transfer device equipped with the same
YASKAWA DENKI SEISAKUSHO KK11 citations82
US9252036B2Feb 2, 2016
Substrate transfer system, substrate processing system, and substrate transfer robot
YASKAWA DENKI SEISAKUSHO KK1 citations62
US9272413B2Mar 1, 2016
Conveying system
YASKAWA DENKI SEISAKUSHO KK2 citations61
US8992160B2Mar 31, 2015
Transfer robot
YASKAWA DENKI SEISAKUSHO KK3 citations61
US9293355B2Mar 22, 2016
Substrate transfer system and substrate processing system
YASKAWA DENKI SEISAKUSHO KK0 citations51
US9028197B2May 12, 2015
Robot with plurality of belts and intermediate pulley
YASKAWA DENKI SEISAKUSHO KK1 citations49
US8807911B2Aug 19, 2014
Transfer robot and equipment front end module including transfer robot with vent part
YASKAWA DENKI SEISAKUSHO KK0 citations41